There is growing interest in relying on micromachined systems for gas-handling applications. Current limitations to the adoption of this technology stem from device operation at high temperatures, thus requiring thermal isolation in addition to vacuum-sealed lead transfer and low parasitic capacitance.
Researchers at the University of Michigan have developed improved micromachined devices including a packaged micromachined pump for on-chip vacuum. The device has attained evacuation of a cavity to 0.46 atm using 80mW input power, while maintaining high thermal isolation between a polysilicon heater of the pump and the rest of the device.
Applications and Advantages
- Actuation of gases for gas chromatography,-nl-spectroscopy, microplasma manufacturing.
- Pneumatic actuation of liquids for lab-on-a-chip-nl-and chemical sensing devices.
- Vacuum encapsulation.
- Can be scaled down to small dimensions,-nl-durability and simplified packaging.
- Improved efficiency, ability to operate-nl-at high temperature.