- Crystalline and
polycrystalline materials can be analysed using Electron Backscatter Diffraction (EBSD) to study the
crystallographic structure, such as: grain orientation, misorientation, texture measurement, grain size distribution, grain boundary type and phases.
- This technique can be used simultaneously with EDS.
- Typically, the sample is tilted to 70° to maximise the intensity of diffracted signal.
- The electrons are subsequently diffracted by the tilted sample and the pattern is detected with a fluorescent screen.
- The pattern is characteristic of the crystal structure and orientation and is named kikuchi pattern.